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CVD
CVD
Maximum operating temperature: 1250°C
Chamber dimensions:
Ø 80 mm x 500 mm
Ø 50 mm x 500 mm
Gas sources: Ar/N2, CH4, H2
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Maximum operating temperature: 1250°C
Chamber dimensions:
Ø 80 mm x 500 mm
Ø 50 mm x 500 mm
Gas sources: Ar/N2, CH4, H2